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| Title: | Micro process engineering fundamentals, devices, fabrication, and applications |
|---|---|
| From: |
ed. by Norbert Kockmann
|
| Person: |
Kockmann, Norbert
|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Weinheim
Wiley-VCH
2013
|
| Series: | Advanced micro & nanosystems
5 |
| Subjects: | |
| Physical Description: | XXII, 507 S. Ill., graph. Darst. |
| ISBN: | 3527335005 9783527335008 |
Staff View
MARC
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Record in the Search Index
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| dewey-search | 660 |
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| discipline | Chemie / Pharmazie Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV041189337 |
| illustrated | Illustrated |
| indexdate | 2024-12-20T16:32:47Z |
| institution | BVB |
| isbn | 3527335005 9783527335008 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026164445 |
| oclc_num | 846958590 |
| open_access_boolean | |
| owner | DE-634 DE-92 DE-1043 |
| owner_facet | DE-634 DE-92 DE-1043 |
| physical | XXII, 507 S. Ill., graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley-VCH |
| record_format | marc |
| series | Advanced micro & nanosystems |
| series2 | Advanced micro & nanosystems |
| spelling | Micro process engineering fundamentals, devices, fabrication, and applications ed. by Norbert Kockmann Weinheim Wiley-VCH 2013 XXII, 507 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advanced micro & nanosystems 5 Mikroverfahrenstechnik gnd Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Chemische Verfahrenstechnik (DE-588)4069941-9 gnd rswk-swf Mikrofluidik (DE-588)4803438-1 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Mikrofluidik (DE-588)4803438-1 s Chemische Verfahrenstechnik (DE-588)4069941-9 s Kockmann, Norbert edt Erscheint auch als Online-Ausgabe, PDF 978-3-527-67505-0 Advanced micro & nanosystems 5 (DE-604)BV019371555 5 |
| spellingShingle | Micro process engineering fundamentals, devices, fabrication, and applications Advanced micro & nanosystems Mikroverfahrenstechnik gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Chemische Verfahrenstechnik (DE-588)4069941-9 gnd Mikrofluidik (DE-588)4803438-1 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4069941-9 (DE-588)4803438-1 |
| title | Micro process engineering fundamentals, devices, fabrication, and applications |
| title_auth | Micro process engineering fundamentals, devices, fabrication, and applications |
| title_exact_search | Micro process engineering fundamentals, devices, fabrication, and applications |
| title_full | Micro process engineering fundamentals, devices, fabrication, and applications ed. by Norbert Kockmann |
| title_fullStr | Micro process engineering fundamentals, devices, fabrication, and applications ed. by Norbert Kockmann |
| title_full_unstemmed | Micro process engineering fundamentals, devices, fabrication, and applications ed. by Norbert Kockmann |
| title_short | Micro process engineering |
| title_sort | micro process engineering fundamentals devices fabrication and applications |
| title_sub | fundamentals, devices, fabrication, and applications |
| topic | Mikroverfahrenstechnik gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Chemische Verfahrenstechnik (DE-588)4069941-9 gnd Mikrofluidik (DE-588)4803438-1 gnd |
| topic_facet | Mikroverfahrenstechnik Mikrosystemtechnik Chemische Verfahrenstechnik Mikrofluidik |
| volume_link | (DE-604)BV019371555 |
| work_keys_str_mv | AT kockmannnorbert microprocessengineeringfundamentalsdevicesfabricationandapplications |